Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining
نویسندگان
چکیده
منابع مشابه
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Acknowledgements It is indeed a great pleasure and moment of immense satisfaction for me to express my sense of profound gratitude towards my committee members Dr. their zeal and enthusiasm were the source of inspiration for me. I am extremely thankful for the able guidance and attention which they bestowed upon me. Center for Advanced Microstructures and Devices for the requisite opportunity a...
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In this paper, we present the design, fabrication and characterization of a novel gas microvalve realized by combining microand fine-machining techniques. The design is for high flow rates at high pressure difference between inlet and outlet, burst pressure of up to 15 bars. There is no power consumption required for the valve to maintain its position during operation in any intermediate state ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11100948